Revolutionary Memory
New development and characterization of oxide-based selector for cross-point 25nm ReRAM
In this paper, the authors report the outstanding performance from an innovative oxide selector for ReRAM (Resistance switching Random Access Memory). SiO2 was chosen as a matrix oxide material and arsenic (As) metal atoms were implanted into the oxide films for threshold switching. Off-current and threshold voltage (Vth) could be controlled by process condition of As implantation. Finally its performance were verified by using 1S1R cross-point array.